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Area of Science:

  • Optoelectronics
  • Infrared Spectroscopy
  • Materials Science

Background:

  • The long-wavelength infrared (LWIR) spectrum is crucial for various sensing applications.
  • Tunable optical filters are essential for selective wavelength detection.
  • Micro electro mechanical systems (MEMS) offer miniaturization and precise control for optical devices.

Purpose of the Study:

  • To design and fabricate a tunable Fabry-Perot interferometer (TFPI) wavelength filter for the LWIR region.
  • To utilize micro electro mechanical systems (MEMS) technology and polydimethylsiloxane (PDMS) micro patterning for filter fabrication.
  • To demonstrate the tunable filtering capability and specific wavelength detection in the LWIR spectrum.

Main Methods:

  • Fabrication of a TFPI-type filter using MEMS and PDMS micro patterning.
  • Integration of an amorphous Si-based thermal infrared (IR) detector beneath the FPI optical filter.
  • Tuning of the air etalon gap via electromagnetic force generated by a permanent magnet and solenoid.

Main Results:

  • The fabricated TFPI filter demonstrated a tunable wavelength range of 4 μm.
  • The PDMS gap height was adjustable from 8 μm to 6 μm with a driving current of 0-600 mA.
  • The filter achieved a 3-dB bandwidth (full width at half maximum, FWHM) of 1.5 nm and a Free Spectral Range (FSR) of 8 μm.

Conclusions:

  • The developed TFPI filter successfully enables tunable wavelength selection in the LWIR region.
  • MEMS and PDMS micro patterning are effective techniques for creating advanced IR optical filters.
  • The device shows potential for specific wavelength detection applications in the long-wavelength infrared spectrum.