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Updated: Feb 6, 2026

The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors
Published on: May 24, 2020
Facile Preparation of Hydrophobic Aluminum Oxide Film via Sol-Gel Method
Changqing Fang1,2, Mengyuan Pu1, Xing Zhou1,2
1Faculty of Printing, Packaging Engineering and Digital Media Technology, Xi'an University of Technology, Xi'an, China.
Abstract:
Hydrophobic aluminum oxide films (AOFs) are widely used in anti-oxidation and anti-corrosion applications. In preparing AOFs, complex and high temperature conditions are usually necessary. Here, we report aluminum nanowire structures with hydrophobic properties, prepared using a facile sol-gel method by magnetic stirrer and hydrothermal reaction. The electromagnetic force work has great influence on the structure of AOFs. The surface morphology and compositions of the AOFs were analyzed by scanning electron microscope (SEM), energy dispersive X-ray spec-trometers (EDS), X-ray diffraction (XRD), 3M peeling test, and X-ray photoelectron spectroscopy (XPS). With the increase of water content in hydrothermal reaction, the hydrophobicity of AOFs proportional increased. Adding 10 ml deionized water leads to the formation of the upper nanowires and the lower nanohole with 129.3° water contact angle. Meanwhile, the AOF provide a good substrate for electroless deposition (ELD) of copper (Cu) to achieve a simple fabrication of metal conductor.
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