TiO_xN_y Modified TiO₂ Powders Prepared by Plasma Enhanced Atomic Layer Deposition for Highly Visible Light...

In this work, TiN film deposited by plasma enhanced atomic layer deposition (PEALD) is adopted to modify the commercial anatase TiO₂ powders. A series of analyses indicate that the surface modification of 20, 50 and 100 cycles of TiN by PEALD does not change the morphology, crystal size, lattice parameters, and surface area of TiO₂ nano powders, but forms an ultrathin amorphous layer of nitrogen doped TiO₂ (TiO_xN_y) on the powder surfaces. This ultrathin TiO_xN_y can facilitate the absorption of TiO₂ in visible light spectrum. As a result, TiO_xN_y coated TiO₂ powders exhibit excellent photocatalytic degradation towards methyl orange under the visible light with good photocatalytic stability compared to pristine TiO₂ powders. TiO_xN_y (100 cycles PEALD TiN) coated TiO₂ powders exhibit the excellent photocatalytic activity with the degradation efficiency of 96.5% in 2 hours, much higher than that of pristine TiO₂ powder of only 4.4%. These results clearly demonstrate that only an ultrathin surface modification layer can dramatically improve the visible light photocatalytic activity of commercial TiO₂ powders. Therefore, this surface modification using ALD is an extremely promising route to prepare visible light active photocatalysts.