Electrically tunable transmission-type beam deflector using liquid crystal with high angular resolution

Highly efficient transmission-type beam deflectors that have high angular resolution have been widely used for various applications. Continuously tunable beam deflectors have also been needed for many purposes. An indium-tin-oxide (ITO), widely used for transparent electrodes, was placed on the upper and lower glass substrate. The ITO layer on the lower substrate was patterned by the contact mask aligner for relatively wide input and output pad compared to main grating ITO patterns in the active area. These input and output pads on the lower substrate are connected to each driving integrated circuit (IC), which has 360 channels for continuous control. A small pixel pitch of grating patterns of 6 μm (the electrode width is 3 μm with a 3 μm spacing) was developed, and the maximum diffraction angle is calculated and measured at 2.541° with a wavelength of 532 nm. A minimal cell gap of 2.5 μm was applied for the full 2π phase modulation by using a high-birefringence liquid crystal. A driving module for continuous beam steering is also developed and applied to the beam deflector system. A diffraction efficiency of about 50.9% is observed at an angle of diffraction about 2.541°.