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Measurement Method for Nonlinearity in Heterodyne Laser Interferometers Based on Double-Channel Quadrature

Haijin Fu1, Ruidong Ji2, Pengcheng Hu3

  • 1Institute of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China. haijinfu@hit.edu.cn.

Sensors (Basel, Switzerland)
|August 24, 2018
PubMed

Keywords:
double-channel quadrature demodulationheterodyne laser interferometerlaser interferometrynonlinearity measurement

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