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Atomic layer deposited Al2O3 thin films as humidity barrier coatings for nanoparticle-based strain sensors

Lampros Patsiouras1, Evangelos Skotadis1, Niovi Gialama1,2

  • 1Department of Applied Physics, National Technical University of Athens, 15780, Zographou, Greece.

Nanotechnology
|August 31, 2018
PubMed

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