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Updated: Feb 6, 2026

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
Published on: June 18, 2020
Lithium niobate micro-disk resonators of quality factors above 107
Abstract:
We report on the fabrication of crystalline lithium niobate microresonators with quality factors above 107, as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the lithium niobate on insulate (LNOI) into a microdisk, followed by a chemo-mechanical polishing process for transferring the disk-shaped pattern to the LNOI. Nonlinear processes including second-harmonic generation and Raman scattering have been demonstrated in the fabricated microdisk.
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