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Updated: Feb 5, 2026

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
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Enhanced Electrical Properties of Atomic Layer Deposited LaxAlyO Thin Films with Stress Relieved Preoxide

Xing Wang1, Hongxia Liu2, Lu Zhao3

  • 1Key Laboratory for Wide-Band Gap Semiconductor Materials and Devices of Education, School of Microelectronics, Xidian University, Xi'an 710071, China. xwangsme@xidian.edu.cn.

Materials (Basel, Switzerland)
|September 5, 2018
PubMed

Keywords:
ALDLaxAlyOSRPOelectrical properties

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