Enhanced Electrical Properties of Atomic Layer Deposited LaxAlyO Thin Films with Stress Relieved Preoxide

Xing Wang1, Hongxia Liu2, Lu Zhao3

  • 1Key Laboratory for Wide-Band Gap Semiconductor Materials and Devices of Education, School of Microelectronics, Xidian University, Xi'an 710071, China. xwangsme@xidian.edu.cn.

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