Design and laboratory testing of a MEMS accelerometer array for subsidence monitoring

The in situ monitoring of displacement variation is important for studying the seabed subsidence mechanism. To meet the multi-point measurement requirements for vertical displacement in subsidence monitoring of the seabed surface, a Micro-Electro-Mechanical Systems accelerometer array was designed. By sensing the tilt angles, displacements on the array can be calculated. The subsidence is calculated as the difference in the displacements from the initial values. To improve the accuracy of the displacement calculation, a calibration model of the tilt angle was presented. The model parameters are computed through a least squares estimation method, which is solved by the Levenberg-Marquardt algorithm. Experimental results show that the calibration model performs excellently with the maximum error of tilt angle being less than 1° in the measurement range (-90°, 90°). The displacement measurement accuracy of the array (2.1 m long) is almost less than 1 cm. Thus, the results show a strong agreement between the detected data and actual deformation in the test.