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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Feng Bu1, Dacheng Xu2, Heming Zhao3
1School of Electronic and Information Engineering, Soochow University, Suzhou 215006, China. bf_suda@126.com.
This study introduces a new method for microelectromechanical systems (MEMS) vibrating gyroscopes to achieve real-time mode-matching. The novel phase-shifted 45° additional force demodulation (45° AFD-RM) improves gyroscope performance and reliability.
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