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Updated: Feb 5, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
A Novel Tri-Axial MEMS Gyroscope Calibration Method over a Full Temperature Range
Haotian Yang1,2, Bin Zhou3, Lixin Wang4
1Department of Precision Instrument, Tsinghua University, Beijng 100084, China. yang-ht17@mails.tsinghua.edu.cn.
This study presents an optimized calibration method for tri-axial micro-electro-mechanical inertial measurement units (MEMS-IMUs) to improve navigation accuracy across varying temperatures. The technique effectively compensates for gyroscope errors without requiring recalibration.
Area of Science:
- Navigation Systems
- Sensor Technology
- Metrology
Background:
- Micro-electro-mechanical inertial measurement units (MEMS-IMUs) are crucial for mid-low navigation due to their low cost, small size, light weight, and low power consumption (CSWap).
- MEMS-IMU performance, particularly gyroscopes, degrades significantly with temperature fluctuations, impacting navigation accuracy.
- Existing calibration methods may be insufficient for full temperature range compensation.
Purpose of the Study:
- To develop an optimized error calibration method for tri-axial MEMS gyroscopes that functions effectively across a full temperature range.
- To enhance the utilization of navigation accuracy from MEMS-IMUs in dynamic temperature environments.
- To provide a robust and efficient calibration solution for engineering applications.
Main Methods:
- Establishment of a comprehensive calibration error model, including package misalignment, sensor non-orthogonality, scale factor, and bias errors.
- Implementation of a three-position positive/reversed test using a single-axis temperature-controlled turntable at multiple reference temperatures.
- Utilization of the least squares method to derive an error compensation vector and establish an error matrix.
Main Results:
- Successful derivation of an error compensation vector using the least squares method and an error matrix.
- Demonstration that error compensation vectors at any known temperature can be calculated via Lagrange interpolation.
- Effective compensation of tri-axial MEMS gyroscope outputs, eliminating the need for recalibration across temperature changes.
Conclusions:
- The proposed optimized error calibration method is effective and feasible for engineering applications.
- Lagrange interpolation enables accurate error compensation vector calculation at specific temperatures, simplifying application.
- The method significantly improves MEMS gyroscope performance and navigation accuracy over a full temperature range.
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