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Updated: Feb 5, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
A Novel Tri-Axial MEMS Gyroscope Calibration Method over a Full Temperature Range
Haotian Yang1,2, Bin Zhou3, Lixin Wang4
1Department of Precision Instrument, Tsinghua University, Beijng 100084, China. yang-ht17@mails.tsinghua.edu.cn.
Abstract:
The micro-electro-mechanical inertial measurement unit (MEMS-IMU) has gradually become a research hotspot in the field of mid-low navigation, because of its advantages of low cost, small size, light weight, and low power consumption (CSWap). However, the performance of MEMS-IMUs can be severely degraded when subjected to temperature changes, especially gyroscopes. In order to make full use of the navigation accuracy, this paper proposes an optimized error calibration method for a tri-axial MEMS gyroscope across a full temperature range. First of all, a calibration error model is established which includes package misalignment error, sensor-to-sensor non-orthogonality error, scale factor, and bias. Then, a simple three-position positive/reversed test is undertaken by carrying out a single-axis temperature-controlled turntable at different reference temperature points. Lastly, the error compensation vector is obtained using the least squares method to establish an error matrix. It is worth mentioning that the error compensation vector at a known temperature point can be calculated through Lagrange interpolation; then, the outputs of the tri-axial MEMS gyroscope can be well compensated, eliminating the need for a recalibration step. The experimental results confirm the effectiveness of the proposed method, which is feasible and operational in engineering applications, and has a certain reference value.
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