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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Aberration correction for low voltage optimized transmission electron microscopy

Jaromír Bačovský1,2

  • 1DELONG INSTRUMENTS a.s., Palackého třída 3019/153 b, 612 00 Brno, Czech Republic.

Methodsx
|September 19, 2018
PubMed

Keywords:
Aberration corrected low voltage transmission electron micrscopyAberration correctionHexapole correctorLow voltage transmission electron microscopy

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