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Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication
K Bazaka1, O Baranov, U Cvelbar
1School of Chemistry, Physics, Mechanical Engineering, Queensland University of Technology, Brisbane, Queensland 4000, Australia. kateryna.bazaka@qut.edu.au.
Nanoscale
|September 19, 2018
Summary
Oxygen plasmas are highly reactive and useful for etching and nanostructure fabrication. This review highlights their capabilities in modifying surfaces and growing complex oxide nanoarchitectures for advanced nanofabrication.
Area of Science:
- Materials Science
- Plasma Physics
- Nanotechnology
Background:
- Oxygen plasmas are chemically reactive but possess unique properties.
- These properties enable applications beyond material removal, including nanostructure synthesis.
Purpose of the Study:
- To review the mechanisms and capabilities of oxygen plasmas in nanofabrication.
- To emphasize their role in catalyzing complex nanoarchitecture growth.
Main Methods:
- Review of representative examples demonstrating oxygen plasma applications.
- Discussion of surface treatment and direct oxide structure growth technologies.
Main Results:
- Oxygen plasmas facilitate both surface modification and direct growth of oxide nanostructures.
- They are shown to be powerful environments for catalyzing complex nanoarchitectures.
Conclusions:
- Oxygen plasmas offer versatile capabilities for advanced nanofabrication.
- Future applications and challenges in using oxygen plasmas are discussed.
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