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Developing Efficient Thin Film Temperature Sensors Utilizing Layered Carbon Nanotube Films
Shrutidhara Sarma1, Jang Ho Lee2
1Department of Mechanical Engineering, National Institute of Technology Delhi, Narela, Delhi 110040, India. shrutidhara.123@gmail.com.
Sensors (Basel, Switzerland)
|September 23, 2018
Summary
This study demonstrates an efficient thin film temperature sensor using carbon nanotube (CNT) films. The developed sensor exhibits a significant resistance change with temperature, suitable for advanced thermal sensing applications.
Area of Science:
- Materials Science
- Nanotechnology
- Sensor Technology
Background:
- Development of reliable thin film temperature sensors is crucial for various applications.
- Carbon nanotube (CNT) films offer promising properties for sensing elements.
- Catalytic growth methods are key to fabricating high-performance CNT films.
Purpose of the Study:
- To fabricate an efficient thin film temperature sensor using chemical vapor deposited carbon nanotube (CNT) films.
- To investigate the electrical response of the CNT-based sensor to temperature variations.
- To characterize the structural and electrical properties of the fabricated sensor.
Main Methods:
- Fabrication of CNT films on Si substrates using chemical vapor deposition with a diamond-like carbon (DLC):Ni catalyst.
- Characterization using scanning electron microscopy (SEM) and Raman spectroscopy.
- Device performance evaluation through van der Pauw and Hall measurements.
Main Results:
- Achieved a relative linear change in resistance of 18.4% over a temperature range of 22 °C to 200 °C.
- Calculated a temperature coefficient of resistance of 1.03 × 10-3/°C.
- Demonstrated good electrical response of the CNT film to temperature changes.
Conclusions:
- The as-grown CNT film is suitable as an active sensing material for thin film temperature sensors.
- The fabricated sensor shows potential for practical applications requiring precise temperature monitoring.
- The study highlights the efficacy of CNTs in advanced sensor design.
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