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Updated: Feb 4, 2026

Metal-Assisted Electrochemical Nanoimprinting of Porous and Solid Silicon Wafers
Published on: February 8, 2022
Controllable conversion of liquid silicon from high-density to low-density towards amorphous silicon nanospheres on a
Qiang Liu1, Ruifeng Qi, Shuang Song
1School of Chemical Engineering, Sichuan University, Chengdu 610065, China. qshuang@scu.edu.cn.
Abstract:
High-density liquid (HDL) silicon can be converted via annealing in hydrogen into low-density liquid (LDL), surviving due to hydrogen protection. Amorphous silicon (a-Si) spheres on a wafer scale were achieved via an underlying transition from LDL silicon. The amorphous spheres were protected from crystallization due to the presence of hydrogen gas.
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