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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron

Fernando E Camino1, Vitor R Manfrinato2, Aaron Stein2

  • 1Center for Functional Nanomaterials, Brookhaven National Laboratory; fcamino@bnl.gov.

Journal of Visualized Experiments : Jove
|October 2, 2018
PubMed

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