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    We discovered a new button-like (BL) resonance mode in microelectromechanical disk resonators. This BL mode offers superior performance for liquid-phase sensing applications compared to existing modes.

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    Area of Science:

    • Microelectromechanical Systems (MEMS)
    • Resonant Sensors
    • Materials Science

    Background:

    • Microelectromechanical (MEM) disk resonators are crucial for sensing applications.
    • Existing resonance modes, like the wine-glass (WG) mode, have limitations in performance.
    • Piezoelectric transduction is key for electrically addressed MEM resonators.

    Purpose of the Study:

    • To introduce and characterize a novel lateral shear resonance mode in MEM disk resonators, termed the button-like (BL) mode.
    • To evaluate the suitability of the BL mode for liquid-phase sensing.
    • To investigate design parameters influencing the BL mode's performance.

    Main Methods:

    • Theoretical analysis of the lateral strain profile of the BL mode.
    • Experimental characterization of MEM disk resonators exhibiting the BL mode.
    • Investigation of factors like tether geometry, disk size, and surrounding gap on the quality (Q) factor.

    Main Results:

    • The BL mode exhibits a unique strain profile suitable for piezoelectric transduction.
    • The BL mode demonstrates higher coupling coefficients and Q factors than the WG mode.
    • Highest Q factor of 410 and lowest motional resistance of 1.36 kΩ were achieved in water for specific disk radii.

    Conclusions:

    • The button-like (BL) mode is a promising advancement for microelectromechanical disk resonators.
    • Its superior performance characteristics make it highly attractive for electrically addressed liquid-phase sensing.
    • Further design optimization can enhance the utility of BL mode resonators.