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Atomically Traceable Nanostructure Fabrication
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Fabrication of buried nanostructures by atomic layer deposition

Rizwan Ali1, Muhammad Rizwan Saleem2,3, Matthieu Roussey2

  • 1Institute of Photonics, University of Eastern Finland, Joensuu, P.O. Box 111, FI-80101, Finland. rizwan.ali@uef.fi.

Scientific Reports
|October 12, 2018
PubMed

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