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First-Surface Scintillator for Low Accelerating Voltage Scanning Electron Microscopy (SEM) Imaging.

Marian B Tzolov1, Nicholas C Barbi2, Christopher T Bowser1

  • 11Department of Physics,Lock Haven University of PA,Lock Haven,PA 17745,USA.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|October 19, 2018
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Summary
This summary is machine-generated.

Highly luminescent zinc tungstate (ZT) thin films enhance electron detection by eliminating the need for charge-reducing conductive layers. This novel "first-surface scintillator" improves low-energy electron detection and imaging capabilities.

Keywords:
SEMcathoduluminescencelow voltage backscattered electron detectorscintillatorzinc tungstate

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Area of Science:

  • Materials Science
  • Surface Science
  • Detector Physics

Background:

  • Conventional scintillators for electron detection require top conducting layers (e.g., Indium Tin Oxide) to prevent charge buildup.
  • These conductive layers are non-scintillating and absorb electrons, limiting detection efficiency, especially at low energies.
  • Zinc tungstate (ZT) films offer luminescence and charge elimination properties.

Purpose of the Study:

  • To develop a "first-surface scintillator" by depositing luminescent zinc tungstate (ZT) films onto conventional scintillators (Yttrium Aluminum Perovskite, Yttrium Aluminum Garnet).
  • To replace non-scintillating, electron-absorbing top conducting layers with a luminescent ZT film for improved electron detection.
  • To evaluate the performance of this new detector structure for electron detection and imaging.

Main Methods:

  • Deposition of highly luminescent zinc tungstate (ZT) thin films on conventional scintillators.
  • Verification of charge elimination by measuring the Duane-Hunt limit and electron emission versus accelerating voltage.
  • Cathodoluminescence measurements (spectral resolution and direct photodetector readings) at various accelerating voltages.
  • Integration of the "first-surface scintillator" into a backscattered electron (BSE) detection system.

Main Results:

  • The ZT film effectively eliminates electrical charge buildup, verified by electrical measurements.
  • The "first-surface scintillator" demonstrates effective detection of low-energy electrons.
  • Cathodoluminescence measurements confirmed the luminescent properties of the ZT film across different accelerating voltages.
  • The new detector shows extended operational range compared to conventional ITO-coated scintillators, which decline below 5 kV.
  • Superior image quality at 1 kV was observed with the first-surface scintillator compared to conventional detectors.

Conclusions:

  • The "first-surface scintillator" design using zinc tungstate films successfully replaces conventional top conducting layers.
  • This approach enhances electron detection efficiency, particularly for low-energy electrons.
  • The novel detector offers superior performance and extended operational range for electron detection and imaging applications, especially at low accelerating voltages.