Germanium Wafers Possessing Facet-Dependent Electrical Conductivity Properties

Pei-Lun Hsieh1, An-Ting Lee2, Lih-Juann Chen1

  • 1Department of Materials Science and Engineering and Frontier Research Center on Fundamental and Applied Sciences of Matters, National Tsing Hua University, Hsinchu, 30013, Taiwan.

Summary

Germanium wafer conductivity varies by crystal facet. Highly conductive {111} and {211} faces show potential for novel germanium fin field-effect transistors (finFETs).

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