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Updated: Feb 3, 2026

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Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced

Lukas Keller1, Michael Huth1

  • 1Institute of Physics, Goethe University, Max-von-Laue-Str. 1, 60438 Frankfurt am Main, Germany.

Beilstein Journal of Nanotechnology
|October 23, 2018
PubMed
Summary

Creating complex 3D nanoarchitectures with focused electron beam induced deposition (FEBID) is now possible. New software strategies and algorithms reliably generate pattern files for precise 3D nano-fabrication.

Keywords:
focused electron beam induced depositionnanofabricationthree-dimensional nanostructures

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Physics

Background:

  • Focused electron beam induced deposition (FEBID) enables fabrication of complex three-dimensional (3D) nanoarchitectures.
  • Applications in nanomagnetics and plasmonics are emerging due to advancements in FEBID.
  • Generating precise pattern files for 3D FEBID remains a significant challenge.

Purpose of the Study:

  • To develop robust strategies and algorithms for generating pattern files for 3D FEBID.
  • To address challenges in mapping geometrical descriptions to shape-conforming 3D deposits.
  • To enable reliable fabrication of complex 3D nanoarchitectures.

Main Methods:

  • Development of novel writing strategies and algorithms in C++.
  • Implementation of a pattern file generator accounting for proximity effects.
  • Correction for height-dependent precursor coverage in the fabrication process.

Main Results:

  • Successful generation of pattern files for diverse 3D nanoarchitectures.
  • Demonstration of FEBID's capability for complex 3D structure fabrication.
  • Validation of the developed algorithms using various precursors.

Conclusions:

  • The developed pattern file generation approach significantly improves the reliability of 3D FEBID.
  • This work facilitates the creation of intricate 3D nanoarchitectures for advanced applications.
  • The implemented strategies overcome key limitations in current 3D nano-fabrication techniques.