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A Study of Parameters Affecting Atom Probe Tomography Specimen Survivability.

Ty J Prosa1, Savanna Strennen2, David Olson3

  • 11CAMECA Instruments Inc.,5470 Nobel Drive,Madison,WI 53711,USA.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|November 6, 2018
PubMed
Summary

Specimen survivability in atom probe tomography (APT) is crucial. Analysis shows that while applied field is important, ion extraction rate significantly impacts specimen success, not just applied force.

Keywords:
analysis yieldelectric fieldexperimental designsilicon-based materialstensile stress

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Surface Science

Background:

  • Specimen survivability is critical for reliable materials analysis using atom probe tomography (APT).
  • Current understanding relies on basic physics principles, but the influence of various analytical conditions on survivability is not well-studied.
  • The interplay between instrumentation parameters and specimen failure mechanisms requires systematic investigation.

Purpose of the Study:

  • To systematically analyze the factors influencing specimen survivability in atom probe tomography.
  • To identify the key analytical conditions and specimen characteristics that correlate with survivability trends.
  • To move beyond common-sense explanations and provide statistically significant insights into APT specimen success.

Main Methods:

  • Fabrication and analysis of 261 specimens of a silicon/silicon-dioxide/silicon material.
  • Systematic variation of analytical conditions, including applied field, ions-per-pulse, and pulse frequency.
  • Statistical correlation analysis to identify significant trends between conditions and specimen survivability.

Main Results:

  • The applied field/force is a significant factor in specimen survivability.
  • Applied field alone does not fully predict survivability trends, especially at silicon/silicon-dioxide interfaces.
  • The rate of ion extraction (ions-per-pulse and pulse frequency) demonstrates comparable importance to the applied field for specimen success.

Conclusions:

  • Survivability in atom probe tomography is influenced by a complex interplay of factors, not just applied force.
  • Ion extraction rate is a critical parameter that warrants careful consideration alongside applied field for optimizing APT experiments.
  • Further research into optimizing analytical parameters is needed to enhance specimen success rates in atom probe tomography.