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Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
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The Development of a Triaxial Cutting Force Sensor Based on a MEMS Strain Gauge

You Zhao1, Yulong Zhao2, Xiaohui Ge3

  • 1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, No. 28, Xianning West Road, Xi'an 710049, China. zhaoyou628@xjtu.edu.cn.

Micromachines
|November 6, 2018
PubMed

Keywords:
cross-interferencecutting force sensordecoupling matrixmicro-electro-mechanical system (MEMS) strain gaugesensitivity

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