A Fluidic Interface with High Flow Uniformity for Reusable Large Area Resonant Biosensors

Area of Science:

• Microfluidics and Biosensor Technology
• Materials Science for Sensor Fabrication

Background:

• Resonant biosensors offer high accuracy and miniaturization but face commercialization challenges due to high fabrication costs.
• The need for reusable biosensors necessitates components that withstand harsh chemical regeneration processes (e.g., H₃PO₄, H₂SO₄).

Purpose of the Study:

• To develop and validate a novel fluidic interface for reusable resonant biosensors.
• To ensure uniform liquid flow and chemical resistance for repeated sensor regeneration.

Main Methods:

• Numerical simulations using the finite element method (FEM) to analyze fluid flow dynamics.
• Fabrication of fluidic interfaces using silicon (Si) via wet chemical etching.
• Experimental validation using micro-particle image velocimetry (μPIV) and visual observation with a glass cover.

Main Results:

• The proposed fluidic interface design demonstrates effective control over liquid flow uniformity.
• Silicon-based interfaces fabricated via wet chemical etching exhibit the required characteristics for reusable biosensor circuits.
• Experimental results using μPIV confirm the effectiveness of the designed fluidic interfaces, aligning with simulation predictions.

Conclusions:

• The developed fluidic interface meets the requirements for reusable resonant biosensors, enhancing their commercial viability.
• This approach enables the repeated use of high-accuracy biosensors, overcoming limitations of disposable designs.