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Fabrication of Vacuum-Sealed Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process

Nguyen Van Toan1, Shim Hahng2,3, Yunheub Song4

  • 1Microsystem Integration Center (μSIC), Tohoku University, Sendai 980-8579, Japan. nvtoan@nme.mech.tohoku.ac.jp.

Micromachines
|November 9, 2018
PubMed

Keywords:
anodic bondingcapacitive micromachined ultrasonic transducerchemical sensingglass reflow processmedical imagingnon-destructive measurement

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