Locally-Actuated Graphene-Based Nano-Electro-Mechanical Switch
Jian Sun1,2, Manoharan Muruganathan3, Nozomu Kanetake4
1School of Material Science, Japan Advanced Institute of Science and Technology, Nomi 923-1211, Japan. jian.sun@riken.jp.
Abstract:
The graphene nano-electro-mechanical switches are promising components due to their outstanding switching performance. However, most of the reported devices suffered from a large actuation voltages, hindering them from the integration in the conventional complementary metal-oxide-semiconductor (CMOS) circuit. In this work, we demonstrated the graphene nano-electro-mechanical switches with the local actuation electrode via conventional nanofabrication techniques. Both cantilever-type and double-clamped beam switches were fabricated. These devices exhibited the sharp switching, reversible operation cycles, high on/off ratio, and a low actuation voltage of below 5 V, which were compatible with the CMOS circuit requirements.
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