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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

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21.69⁻24.36 GHz MEMS Tunable Band-Pass Filter

Zhongliang Deng1, Hao Wei2, Xubing Guo3

  • 1School of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China. dengzhl@bupt.edu.cn.

Micromachines
|November 9, 2018
PubMed

Keywords:
inductively-tuned slow-wave resonatormicroelectromechanical systems (MEMS)tunable band-pass filter

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