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Reliability Design and Electro-Thermal-Optical Simulation of Bridge-Style Infrared Thermal Emitters

Peng Zhou1, Ranbin Chen2, Na Wang3

  • 1Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China. zhoup@stu.xmu.edu.cn.

Micromachines
|November 9, 2018
PubMed

Keywords:
finite element methodinfrared emissionmicro-electromechanical systemsthermal emitter

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