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Temperature-programmed Deoxygenation of Acetic Acid on Molybdenum Carbide Catalysts
Published on: February 7, 2017
Ha-Duong Ngo1,2, Biswajit Mukhopadhyay3, Piotr Mackowiak4
1Center of Microperipheric Technologies, Fraunhofer Institute IZM, Berlin 13355, Germany. ha-duong.ngo@izm.fraunhofer.de.
We developed a new WSi-WSiN-Pt metallization scheme for silicon carbide (SiC) microsystems. This robust scheme offers excellent long-term stability for harsh environment applications.
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