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Updated: Feb 2, 2026

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
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Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools

Published on: October 1, 2007

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Scanning Micromirror Platform Based on MEMS Technology for Medical Application

Eakkachai Pengwang1,2, Kanty Rabenorosoa3, Micky Rakotondrabe4

  • 1Automatic Control and Micro-Mechatronic Systems Department (AS2M), FEMTO-ST Institute, UMR CNRS 6174-UFC/ENSMM/UTBM, Besancon 25000, France. eakkachai@fibo.kmutt.ac.th.

Micromachines
|November 9, 2018
PubMed

Keywords:
MEMS scanning micromirrorMOEMSbioMEMSbiomedical micro-actuatormicro robotsmicro-opticsmulti-degree-of-freedom stageoptical MEMS

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