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Resonant Varifocal Micromirror with Piezoresistive Focus Sensor

Kenta Nakazawa1, Takashi Sasaki2, Hiromasa Furuta3

  • 1Department of Nanomechanics, Tohoku University, Aramaki-aza Aoba 6-6-01, Aoba-ku, Sendai 980-8579, Japan. k.nakazawa@hane.mech.tohoku.ac.jp.

Micromachines
|November 9, 2018
PubMed

Keywords:
microelectromechanical systemspiezoresistorresonant vibrationvarifocal mirror

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