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Related Experiment Video

Updated: Feb 2, 2026

Experimental Methods for Investigation of Shape Memory Based Elastocaloric Cooling Processes and Model Validation

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Published on: May 2, 2016

Miniaturized Rotary Actuators Using Shape Memory Alloy for Insect-Type MEMS Microrobot.

Ken Saito¹, Kei Iwata², Yuki Ishihara³

¹Department of Precision Machinery Engineering, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi-shi, Chiba 274-8501, Japan. kensaito@ecs.cst.nihon-u.ac.jp.

|November 9, 2018

Summary

Researchers developed a new insect-type microrobot using micro-electromechanical systems (MEMS) technology. This microrobot can locomote using step patterns, overcoming challenges with uneven surfaces and demonstrating continuous rotation capabilities.

Keywords:

MEMS artificial neural networks heat conduction microrobot rotary actuator shape memory alloy

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Area of Science:

Robotics
Micro-electromechanical Systems (MEMS)
Biomimetics

Background:

Locomotion on uneven surfaces remains a challenge for existing microrobots.
Insect-inspired designs offer potential solutions for robust microrobot locomotion.
Previous microrobot systems struggled with efficient movement on complex terrains.

Purpose of the Study:

To develop a novel insect-type microrobot capable of step-pattern locomotion.
To integrate artificial neural networks (ANNs) with micro-actuators for autonomous control.
To improve the locomotion speed and efficiency of micro-electromechanical systems (MEMS) microrobots.

Main Methods:

Utilized shape memory alloy (SMA)-type rotary actuators for generating locomotion.
Constructed artificial neural networks (ANNs) using analog integrated circuit (IC) technology for waveform generation.
Integrated SMA actuators and ANNs using micro-electromechanical system (MEMS) technology on silicon wafers.

Main Results:

Successfully developed a MEMS microrobot system capable of step-pattern locomotion.
The insect-type MEMS microrobot measures less than 5.0 mm and weighs 0.079 g.
A new rotary actuator design demonstrated continuous rotation, addressing previous speed limitations.

Conclusions:

The developed MEMS microrobot system exhibits promising step-pattern locomotion capabilities.
The integration of ANNs and SMA actuators via MEMS technology enables autonomous microrobot control.
Further research on rotary actuator design is crucial for enhancing microrobot locomotion speed.