Recent Progress on Photoacoustic Imaging Enhanced with Microelectromechanical Systems (MEMS) Technologies

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Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
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Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS

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Changho Lee1, Jin Young Kim2, Chulhong Kim3,4

  • 1Department of Nuclear Medicine, Chonnam National University Medical School & Hwasun Hospital, Hwasun 58128, Korea. ch31037@jnu.ac.kr.

Micromachines
|November 11, 2018
PubMed

Keywords:
MEMS scanning mirroracoustic delay linemicroelectromechanical systems (MEMS)micromachined US transducermicroring resonatorphotoacoustic imaging

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