Method of Measuring the Mismatch of Parasitic Capacitance in MEMS Accelerometer Based on Regulating Electrostatic

Xianshan Dong1, Shaohua Yang2,3, Junhua Zhu4

  • 1Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, No.5 Electronics Research Institute of the Ministry of Industry and Information Technology, Guangzhou 510610, China. dongxs@pku.edu.cn.

Micromachines
|November 15, 2018
PubMed

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