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A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators

Faisal Iqbal1, Byeungleul Lee2

  • 1Interdisciplinary Program in Creative Engineering, Korea University of Technology and Education, Cheonan 31253, Republic of Korea. faisal@koreatech.ac.kr.

Micromachines
|November 15, 2018
PubMed

Keywords:
MEMS resonatorelectrostatic actuationfrequency domainmeasurement variationresonant characteristics

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