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FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor.

Hongjie Lei1,2, Quan Wen3,4,5, Fan Yu6,7

  • 1Microsystem Research Center, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China. leihongjie@cqu.edu.cn.

Micromachines
|November 15, 2018
PubMed
Summary
This summary is machine-generated.

This study introduces a low-cost, robust electromagnetic scanning micromirror using printed circuit board technology. It achieves a large optical scan angle, ideal for large-aperture, low-frequency optical microsystems.

Keywords:
angle sensorelectromagnetic actuatorflame retardant 4 (FR4)scanning micromirror

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Area of Science:

  • Optoelectronics
  • Materials Science
  • Mechanical Engineering

Background:

  • Conventional microelectromechanical systems (MEMS) micromirrors face limitations in large-aperture and low-frequency scanning applications.
  • Need for cost-effective, robust scanning micromirrors for specialized optical systems.

Purpose of the Study:

  • To develop and characterize a novel flame retardant 4 (FR4)-based electromagnetic scanning micromirror.
  • To address limitations of existing MEMS micromirrors for large-aperture and low-frequency applications.
  • To integrate an electromagnetic angle sensor for real-time motion monitoring.

Main Methods:

  • Fabrication using commercial printed circuit board (PCB) technology.
  • Bonding of an aluminum-coated silicon mirror plate onto an FR4 platform.
  • Integration of an electromagnetic angle sensor for closed-loop control and monitoring.
  • Performance testing including optical scan angle, driving voltage, sensor characteristics, and reliability tests (shock, vibration, mechanical cycling).

Main Results:

  • Achieved an optical scan angle of 11.2 degrees at resonance (361.8 Hz) with a low driving voltage of 425 mV.
  • Integrated angle sensor demonstrated good signal-to-noise ratio, linearity, and sensitivity.
  • The FR4-based micromirror successfully passed shock and vibration tests.
  • Long-term mechanical cycling (50 million cycles) showed minimal variation (<0.3% in resonant frequency, <6% in scan angle).

Conclusions:

  • The developed FR4-based electromagnetic scanning micromirror offers a simple, robust, and cost-effective solution.
  • It overcomes limitations of conventional MEMS micromirrors for large-aperture and low-frequency scanning.
  • The micromirror shows significant potential for various optical microsystems requiring large-aperture or low-frequency scanning capabilities.