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AFM-Based Characterization Method of Capacitive MEMS Pressure Sensors for Cardiological Applications

Jose Angel Miguel1, Yolanda Lechuga2, Mar Martinez3

  • 1Group of Microelectronics Engineering, Department of Electronics Technology, Systems Engineering and Automation, University of Cantabria, Santander 39005, Spain. jamd@teisa.unican.es.

Micromachines
|November 15, 2018
PubMed

Keywords:
MEMS characterizationMEMS modellingatomic force microscopecapacitive pressure sensormicro-electro-mechanical systems (MEMS) sensorsstent

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