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An Improved Phase-Robust Configuration for Vibration Amplitude-Phase Extraction for Capacitive MEMS Gyroscopes
Xudong Zheng1, Siqi Liu2, Yiyu Lin3
1Micro-satellite Research Center, Zhejiang University, Hangzhou 310007, China. zhengxudong@zju.edu.cn.
Micromachines
|November 15, 2018
Summary
This study introduces an improved algorithm for capacitive microelectromechanical systems (MEMS) gyroscopes, enhancing vibration amplitude-phase extraction. The new method significantly reduces bias instability and long-term drift by being insensitive to capacitance-voltage circuit variations.
Area of Science:
- Electrical Engineering
- Mechanical Engineering
- Sensor Technology
Background:
- Capacitive microelectromechanical systems (MEMS) gyroscopes are crucial for inertial navigation.
- Extracting accurate amplitude-phase information is vital for gyroscope performance.
- Traditional methods suffer from bias instability and drift due to circuit variations.
Purpose of the Study:
- To present a novel algorithm for improved vibration amplitude-phase information extraction in MEMS gyroscopes.
- To enhance the long-term drift and bias instability performance of MEMS gyroscopes.
- To demonstrate the algorithm's insensitivity to capacitance-voltage (CV) circuit phase variations.
Main Methods:
- Development of an improved algorithm for amplitude-phase extraction.
- Implementation of the algorithm in a capacitive MEMS gyroscope configuration.
- Experimental validation and comparison with traditional Double-Side-Band (DSB) and Single-Side-Band (SSB) demodulation techniques.
Main Results:
- The improved algorithm yields amplitude and phase information insensitive to CV circuit phase variations.
- Bias instability was reduced to 0.64°/h, a 2x improvement over DSB and 4.3x over SSB.
- Allan deviation analysis confirmed significant reduction in slow-varying drift terms compared to DSB and SSB.
Conclusions:
- The proposed algorithm offers superior performance in MEMS gyroscope applications.
- Insensitivity to CV phase variation effectively mitigates long-term drift and bias instability.
- This advancement provides a more robust and accurate solution for inertial sensing.
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