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A ΣΔ Closed-Loop Interface for a MEMS Accelerometer with Digital Built-In Self-Test Function.

Dongliang Chen1,2, Xiaowei Liu3,4,5, Liang Yin6,7

  • 1MEMS Center, Harbin Institute of Technology, Harbin 150001, China. zoom_chen@126.com.

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|November 15, 2018
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Summary
This summary is machine-generated.

This study presents a novel fifth-order sigma-delta (ΣΔ) closed-loop interface for MEMS accelerometers, incorporating built-in self-test (BIST) capabilities. The integrated BIST unit enhances stability and reliability for high-end applications.

Keywords:
MEMS accelerometerbuilt-in self-testdigital resonatorelectromechanical delta-sigmain situ self-testing

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Area of Science:

  • Electrical Engineering
  • Microelectromechanical Systems (MEMS)
  • Sensor Technology

Background:

  • Sigma-delta (ΣΔ) closed-loop systems are crucial for MEMS accelerometer interface circuits.
  • Stability and reliability issues currently limit the application of ΣΔ closed-loop accelerometers in high-end devices.
  • In situ self-testing and calibration are gaining attention to address these limitations, but circuit-based self-testing methods are scarce.

Purpose of the Study:

  • To propose a fifth-order ΣΔ closed-loop interface circuit for capacitive MEMS accelerometers.
  • To address and solve the nonlinearity problems inherent in the system.
  • To integrate a built-in self-test (BIST) unit for in situ loop distortion testing.

Main Methods:

  • Detailed analysis and solutions for system nonlinearity.
  • Integration of an on-chip BIST unit utilizing a digital resonator for electrostatic excitation.
  • Employing single-bit ΣΔ-modulation for the digital excitation to improve noise and linearity.

Main Results:

  • Successfully proposed a fifth-order ΣΔ closed-loop interface for capacitive MEMS accelerometers.
  • Addressed and provided solutions for system nonlinearity.
  • Demonstrated the effectiveness of the integrated BIST unit for in situ self-testing of loop distortion.

Conclusions:

  • The proposed fifth-order ΣΔ closed-loop interface with integrated BIST offers a viable solution for enhancing the stability and reliability of MEMS accelerometers.
  • The digital electrostatic excitation method via ΣΔ modulation effectively improves excitation quality and distortion detection.
  • This approach facilitates in situ self-testing and calibration, paving the way for advanced MEMS accelerometer applications.