A 0.35-μm CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection

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Updated: Feb 2, 2026

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
16:05

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools

Published on: October 1, 2007

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Rafel Perelló-Roig1, Jaume Verd2, Joan Barceló3

  • 1System Electronic Group (Physics Department), Universitat de les Illes Balears, Palma 07122 (Balearic Islands), Spain. rafel.perello@uib.es.

Micromachines
|November 15, 2018
PubMed

Keywords:
CMOS-MEMSMEMS resonatorsmass sensorspierce oscillator

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