RF Channel-Select Micromechanical Disk Filters-Part I: Design

This Part I of two papers introduces a design flow for micromechanical RF channel-select filters with tiny fractional bandwidths capable of eliminating strong adjacent channel blockers directly after the antenna, hence reducing the dynamic range requirement of subsequent stages in an RF front-end. Much like VLSI transistor circuit design, the mechanical circuit design flow described herein is hierarchical with a design stack built upon vibrating micromechanical disk building blocks capable of Q 's exceeding 10 000 that enable low-filter passband loss for tiny fractional bandwidths. Array composites of half-wavelength coupled identical vibrating disks constitute a second level of hierarchy that reduces the filter termination impedance. A next level of hierarchy couples array composites with full-wavelength beams to affect fully balanced differential operation. Finally, identical differential blocks coupled with quarter-wavelength beams generate the desired passband. Part II of this study corroborates the efficacy of this design hierarchy via experimental results that introduce a 39-nm-gap capacitive transducer, voltage-controlled frequency tuning, and differential operation toward demonstration of a 0.1% bandwidth, 223.4-MHz channel-select filter with only 2.7 dB of in-band insertion loss and 50 dB of stopband rejection.