Soft hydrogen plasma induced phase transition in monolayer and few-layer MoTe2

Haiyan Nan1, Jie Jiang2, Shaoqing Xiao1

  • 1Engineering Research Center of IoT Technology Applications (Ministry of Education), Department of Electronic Engineering, Jiangnan University, Wuxi 214122, People's Republic of China.

Nanotechnology
|November 20, 2018
PubMed
Summary

Soft hydrogen plasma treatment enables reversible phase engineering in molybdenum ditelluride (MoTe2) 2D materials. This facile technique allows tuning between semiconducting and metallic phases for advanced electronic devices.

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