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Simple method for volumetric thickness measurement using a color camera.

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    This summary is machine-generated.

    This study introduces a simple, high-speed thickness measurement method using just a color camera. It accurately measures thin films like silicon dioxide and silicon nitride by converting spectral data into RGB format.

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    Area of Science:

    • Materials Science
    • Optical Metrology
    • Thin Film Analysis

    Background:

    • Accurate thickness measurement is crucial for quality control in thin film manufacturing.
    • Existing methods can be slow or require complex equipment for in-line inspection.

    Purpose of the Study:

    • To develop a simple, cost-effective, in-line method for volumetric thickness measurement.
    • To utilize a standard color camera for high-speed spectral analysis.

    Main Methods:

    • Employs a Bayer filter and CMOS sensor to capture spectrally resolved reflectance in the spatial domain (RGB data) in a single shot.
    • Derives a modified reflectance to translate conventional wavelength-domain spectral reflectance into the RGB domain.
    • Considers wide-band multi-spectral acquisition characteristics for accurate thickness determination.

    Main Results:

    • Successfully validated the method for measuring uniformly deposited silicon dioxide (SiO2) films.
    • Demonstrated effectiveness in measuring tapered silicon nitride (SiNx) films, indicating versatility.
    • Achieved high-speed, in-line inspection capabilities.

    Conclusions:

    • The proposed method offers a simple and efficient approach for in-line thickness measurement of thin films.
    • It leverages readily available color camera technology for spectral analysis.
    • Provides a viable alternative for quality control in manufacturing processes requiring precise film thickness monitoring.