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Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
Published on: July 26, 2016
Joel Posthuma de Boer1, Ian J Ford2, Lev Kantorovich3
1The Blackett Laboratory, Imperial College London, London SW7 2BZ, United Kingdom.
We developed a phase-field method to simulate epitaxial growth, accurately modeling atom diffusion, island formation, and scaling laws. This method aligns with kinetic Monte Carlo simulations for various growth conditions.
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