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Nanofocusing of X-ray free-electron laser using wavefront-corrected multilayer focusing mirrors
S Matsuyama1, T Inoue2, J Yamada2
1Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka, 565-0871, Japan. matsuyama@prec.eng.osaka-u.ac.jp.
Scientific Reports
|November 30, 2018
Summary
Researchers developed a novel method for fabricating multilayer focusing mirrors capable of sub-10-nm X-ray focusing. This technique significantly improved mirror accuracy, enabling advanced X-ray applications.
Area of Science:
- Optics
- Materials Science
- X-ray Optics
Background:
- Achieving sub-10-nm X-ray focusing is critical for advanced scientific research.
- Multilayer Kirkpatrick-Baez (KB) mirrors are essential for X-ray focusing applications.
- Minimizing wavefront aberrations in multilayer optics is a key challenge.
Purpose of the Study:
- To establish a method for fabricating multilayer focusing mirrors with sub-10-nm focusing capabilities.
- To measure and correct wavefront aberrations in multilayer KB mirror optics.
- To validate the performance of corrected mirrors for diffraction-limited focusing.
Main Methods:
- Fabrication of multilayer focusing mirrors.
- Measurement of wavefront aberration using a single grating interferometer at 9.1 keV at SPring-8 Angstrom Compact Free Electron Laser (SACLA).
- Direct mirror shape correction using a differential deposition method.
Main Results:
- Wavefront aberration was significantly reduced from 2.7 (3.3) rad to 0.52 (0.82) rad in the vertical (horizontal) direction.
- The corrected mirrors demonstrated improved accuracy for diffraction-limited focusing.
- Wave-optical simulations confirmed the capability for sub-10-nm X-ray focusing.
Conclusions:
- The established fabrication method enables the creation of high-precision multilayer focusing mirrors.
- Direct correction of mirror shape is effective in reducing wavefront aberrations.
- These corrected mirrors are capable of achieving unprecedented sub-10-nm X-ray focusing, advancing X-ray science.
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