Related Experiment Video
Updated: Feb 1, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Using transmission Kikuchi diffraction in a scanning electron microscope to quantify geometrically necessary
X Z Liang1, M F Dodge2, J Jiang3
1Department of Engineering, University of Leicester, University Road, Leicester LE1 7RH, UK; Department of Engineering, Engineering Building, Lancaster University, LA1 4YW, UK.
Abstract:
It is challenging to quantify the geometrically necessary dislocation (GND) density at the nanoscale using conventional electron backscatter diffraction due to its limited spatial resolution. To overcome this problem, in this study, the transmission Kikuchi diffraction (TKD) technique is used to measure lattice orientation and to calculate the corresponding nanoscale GND density. Using the TKD method, a variation of GND density from 6 × 1014 to 1016 m-2 has been measured in a welded super duplex stainless steel sample. The distribution of dislocation density is shown to be in good agreement with transmission electron microscope (TEM) result. Compared with dislocation measurements obtained by TEM, the TKD-GND method is revealed to be a relatively accurate, fast and accessible method.
More Related Videos
Related Concept Videos
Transmission Electron Microscopy
Scanning Electron Microscopy
Fundamental Principles
Accelerated...
Interference and Diffraction
Geometric Mean
In cases of multiplicative data, the geometric mean is used for statistical analysis. First, the product of all the elements is taken. Then, if there are n elements in the...
Geometric Sequences
Electron Microscope Tomography and Single-particle Reconstruction
Electron Tomography
Electron tomography can be performed either in TEM or STEM (scanning transmission...

