Transmission Electron Microscopy
Scanning Electron Microscopy
Interference and Diffraction
Geometric Mean
Geometric Sequences
Electron Microscope Tomography and Single-particle Reconstruction
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Updated: Feb 1, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
X Z Liang1, M F Dodge2, J Jiang3
1Department of Engineering, University of Leicester, University Road, Leicester LE1 7RH, UK; Department of Engineering, Engineering Building, Lancaster University, LA1 4YW, UK.
Quantifying nanoscale geometrically necessary dislocation (GND) density is difficult. Transmission Kikuchi diffraction (TKD) offers an accurate, fast, and accessible method for measuring nanoscale GND density, overcoming limitations of conventional techniques.
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