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Electron attachment to hexafluoropropylene oxide (HFPO)

M Zawadzki1, A Chachereau2, J Kočišek1

  • 1J. Heyrovský Institute of Physical Chemistry, Czech Academy of Sciences, Dolejškova 3, 18223 Prague, Czech Republic.

The Journal of Chemical Physics
|December 4, 2018
PubMed
Summary

We measured electron attachment cross sections for hexafluoropropylene oxide (HFPO) using two methods. Results from both experiments agreed well, providing crucial data for understanding HFPO plasma chemistry.

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