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Updated: Feb 1, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
High-contrast and low-power all-optical switch using Fano resonance based on a silicon nanobeam cavity
Abstract:
We experimentally demonstrate an ultra-compact all-optical switch involving Fano resonance based on a side-coupled Fabry-Perot (F-P) resonator and a silicon photonic crystal (PhC) nanobeam cavity, with an area of only 11 μm2. By optimizing the structure of the nanobeam cavity to increase its intrinsic quality factor (Q), we achieve a sharp asymmetric transmission spectrum, with an extinction ratio (ER) as high as 40 dB and a peak loss as low as 0.6 dB. As far as we know, this is the highest measured ER in PhC-based Fano resonance. These excellent properties enable us to realize an all-optical switch with shorter switching recovery time, lower power consumption, and higher contrast, compared to that involving Lorentzian resonance. For example, under signal trains of 2.5 Gb/s, switching energy with a contrast of 3 dB for the Fano case is 113 fJ, which is 8 dB smaller than that for the Lorentzian case. Furthermore, by performing blue-detuned filtering on the 15-Gb/s output signal light, the switching contrast of the all-optical switch based on Fano resonance is significantly improved from 0.67 dB to 9.53 dB.
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