A Miniature Resonant and Torsional Magnetometer Based on Lorentz Force

Area of Science:

• Microelectromechanical Systems (MEMS)
• Sensor Technology
• Magnetometry

Background:

• Lorentz force-based magnetometers are crucial for precise magnetic field measurements.
• Existing MEMS magnetometers face challenges in sensitivity and miniaturization for space applications.

Purpose of the Study:

• To investigate a novel MEMS torsional resonant magnetometer design.
• To enhance sensor sensitivity and performance for space-based attitude determination.

Main Methods:

• Fabrication of a MEMS magnetometer using processes like lift-off, anodic bonding, and plasma etching.
• Integration of a folded torsional beam and double-layer excitation coil to boost sensitivity.
• Testing sensor performance (sensitivity, repeatability) in a low-pressure environment.

Main Results:

• Successful fabrication and packaging of a MEMS torsional resonant magnetometer prototype.
• Demonstrated proportionality between magnetic field strength and torsional displacement.
• Analysis of structural parameter influences on sensor performance.

Conclusions:

• The developed MEMS magnetometer meets the stringent requirements for attitude determination in low Earth orbit satellites.
• The enhanced design with folded beams and double-layer coils significantly improves sensor capabilities.